000 00323nam a2200121Ia 4500
008 170101s1962 xx 000 0 und d
082 _a537.622 BRO
100 _aBrooks M. S.
245 0 _aUltrapurification of Semiconductor Materials.
260 _aNew York
_bThe Mac Millan Co.
_c1962
300 _a655 p
942 _2ddc
_cB
999 _c96366
_d96366